• Practical Mems: Design of Microsystems, Accelerometers, Gyroscopes, RF Mems, Optical Mems, and Microfluidic Systems

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Practical Mems: Design of Microsystems, Accelerometers, Gyroscopes, RF Mems, Optical Mems, and Microfluidic Systems

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Title: Practical Mems: Design of Microsystems, Accelerometers, Gyroscopes, RF Mems, Optical Mems, and Microfluidic Systems
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